Shrinking technology nodes and smaller process margins require improved photolithography overlay control. Generally, overlay measurement results are modeled with Cartesian polynomial functions for ...

Sensel’s Morph is a pressure-sensitive touch controller that’s easier to use than it is to describe. Unlike other touchpads, it’s infinitely customizable and comes with several overlays that transform ...

Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay ...