IEEE

Improvement of Multilayer Perceptron Model for Predicting Etch Rates in CFâ‚„ Plasma With Optical Emission Spectrometer and VI Sensor Data

Abstract: We studied a multilayer perceptron model to predict the etch rates of SiO2 and Si3N4 thin films in CF4 plasma using data obtained from a voltage–current (VI) sensor and an optical emission ...
IEEE

Piecewise Linearization and Neighborhood-Structure-Based Heuristic for the Sensor-Weapon-Target Assignment Problem

Abstract: Sensor-weapon-target assignment (S-WTA) problem is a widely known combinatorial optimization problem extended from weapon-target assignment (WTA) problem. There has been few research on how ...