Abstract: Hybrid wafer bonding is a key technology for enabling fine-pitch 3D integration, yet its quality remains highly sensitive to wafer warpage and misalignment. This study develops a 3D finite ...
Abstract: In this paper, we demonstrate the use of segregated hydrofluoroethers (HFE) as effective co-solvents in semiconductor wafer processing. Three examples are provided, etching of silicon oxide, ...
Variation is becoming a bigger problem in multi-die assemblies with TSVs and hybrid bonding. Multi-modal approaches are required to test these devices. AI plays a role in improving defect capture rate ...
As OEMs expand EV platforms and 800V architectures, SiC content per vehicle rises, directly lifting wafer processing demand across substrates and epi wafers. 2) Grid modernization and renewable ...
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