Abstract: In this paper, we present an ultra-miniature optical fiber accelerometer based on a micrometer-scale fiber-top Fabry-Pérot (FP) micro-interferometer. Using an in-situ 3D microprinting ...
Abstract: In this article, a novel symmetric-structure-based silicon microelectromechanical systems (MEMS) piezoresistive accelerometer is proposed. Compared to conventional structures based on ...